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Opto Mechical Assiciate.co

Air Bearing System

> 제품소개 > Motion/Vibration > Air Bearing System

제품소개

  • Newport의 Air-Bearing System은 Wafer Inspection, Optical Lithography,Nano Imprint Lithography & Memory Repair 어플 리케이션 등으로 사용되고 있으며, 이미 1,000대가 넘는 시스템이 설치되어 사용되고 있다. 여러 종류의Flatform이 있는데, 자 세한 내용은 Newport Website에서 확인 가능하다.

pdfAir Bearing Solutions

  • DynamYX™ Datum / General Specifications

DynamYXTM Datum / General Specifications

  • Acceleration: 3G X-Axis, 5G Y-Axis
  • Velocity: 1000mm/sec
  • Repeatability: ±25nm (long term)
  • Accuracy: 0.2μm (linear encoders)
  • Natural Frequency: 300 Hz
General Specifications
General Specifications
Travel Range (standard, encoder or Interferometer) 380 mm X-axis, 350 mm Y-axis
Travel Range(macimum, encoder) 520 mm X-axis, 350 mm Y-axis
Footerprint (without bridge pillars, standard travel) 1040 mm x 918 mm
Rated Payload (maintanins dynamic specifications) 3kg
Maximum Load Capacity 30kg
Maximum Velocity (rated payload) 1000 mm/sec X-axis, 1000 mm/sec Y-axis
Peak Acceleration (rated payload) 3.0 G X-axis, 5.0 G X-axis
RMS Acceleration (rated payload) 1.1 G X-axis, 1.1 G X-axis
Granite Base Thickness (standard travel) 300mm
Total Weight 600kg
Stiffness, Frist Natural Frequency (rated payload) 300Hz
MTBF 20,000hrs
  • HybrYX™ / General Specifications
  • Scan & Step 어플리케이션에 적합하도록 디자인된 시스템으로, Scan Axis는 Air-Bearing 이 Step Axis는 Linear Motor가 적용된 시스템으로 아래와 같은 성능을 갖는다.

HybrYXTM  / General Specifications

  • Jitter & dynamic straightness of less than ± 25nm during high speed motion
  • Better than 0.1% velocity ripple
  • Compact 1200mm by 765mm footprint with 650mm by 350mm travel range
  • Long-life & high MTBF as air bearing is not limited by bearing travel/life- expectancy
General Specifications
General Specifications
Travel Range (standard) 380 mm X-axis, 650 mm Y-axis
Footerprint (without bridge pillars) 1200 mm x 765 mm
Rated Payload (maintanins dynamic specifications) 14kg
Maximum Load Capacity 20kg
Maximum Velocity (rated payload) 300 mm/sec X-axis, 600 mm/sec Y-axis (scanning)
Peak Acceleration (rated payload) 3.0 G X-axis, 5.0 G X-axis
RMS Acceleration (rated payload) 1.15 G X-axis, 0.2 G Y-axis
Granite Base Thickness (standard travel) 250mm
Total Weight 750kg
Stiffness, Frist Natural Frequency (rated payload) 150Hz
MTBF 20,000hrs
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